Masking technique for coating thickness control on large and strongly curved aspherical optics

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Masking technique for coating thickness control on large and strongly curved aspherical optics.

We discuss a method to control the coating thickness deposited onto large and strongly curved optics by ion beam sputtering. The technique uses an original design of the mask used to screen part of the sputtered materials. A first multielement mask is calculated from the measured two-dimensional coating thickness distribution. Then, by means of an iterative process, the final mask is designed. ...

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ژورنال

عنوان ژورنال: Applied Optics

سال: 2009

ISSN: 0003-6935,1539-4522

DOI: 10.1364/ao.48.003760